This page will detail the methods used to characterize gallium nitride (GaN) to be used as a substrate material for the electronics industry.
It will answer the following questions
What tools are used?[edit | edit source]
Installed apparatus in the MBE facility MOST[edit | edit source]
RHEED Gun[edit | edit source]
Perkin Elmer Model 06-190 10 keV HEED Gun, Perkin Elmer 20-330 RHEED Gun Control
CCD Camera/Crystal Monitor[edit | edit source]
K-Space (KSA) BP-M1 CCD Camera, KSA 300/400 Software
Gas Analyzer/Mass Spectrometer[edit | edit source]
Inficon Transpector TH100 F&M Quadrupole Residual Gas Analyzer, Transpector Ware V2.0 Software
Available Facilities in MTU[edit | edit source]
1)Field Emission Scanning Electron Microscopy 2)Transmission Electron Microscopy 3)Atomic Force Microscopy 4)X-Ray Diffraction Facility 5)Pumping Laser Photoluminescence System