Searches
Residual gas analyzer calibration Residual gas analyzer vacuum outgassing polymer offgassing polymer vacuum contamination
Journals
1. Acta Materialia
2. Polymer Journal (by Nature)
3. Nanotechnology (iop)
4. MDPI Materials
5. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (TOP PICK)
6. Vacuum
Introduction
Experimental
RGA Calibration
- Malyshev, O.B. and Middleman, K.J., 2008. In situ ultrahigh vacuum residual gas analyzer “calibration”. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 26(6), pp.1474-1479.
- Santeler, D.J., 1987. Gas dynamics in residual gas analyzer calibration. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 5(1), pp.129-133.
- Bley, W.G., 1988. Quantitative measurements with quadrupole mass spectrometers: Important specifications for reliable measurements. Vacuum, 38(2), pp.103-109.
- Blanchard, W.R., McCarthy, P.J., Dylla, H.F., LaMarche, P.H. and Simpkins, J.E., 1986. Long‐term changes in the sensitivity of quadrupole mass spectrometers. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 4(3), pp.1715-1719.
- Fultz, C.R. and Carver, D.W., 1975. Ultrahigh vacuum system for metering gas flow (leaks) and computing flow rate (U).
- Johnson, R., Winningham, B. and Schuur, J., 2008, November. Characterization of a Small Form Factor Multipole RGA for Process Chamber Monitoring and for Reduction in Time to Complete Routine Preventive Maintenance. In AIP Conference Proceedings (Vol. 1066, No. 1, pp. 152-155). AIP.
- Winkelman, C.R. and Davidson, H.G., 1979. Ultrasensitive leak detection. Vacuum, 29(10), pp.361-363.
Methods
- Holtrop, K.L. and Hansink, M.J., 2006. High temperature outgassing tests on materials used in the DIII-D tokamak. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 24(4), pp.1572-1577.
- Shultz, C.M., Bokwa, S.R., Johnson, R.E. and Miller, J.M., 1988. Tritium monitoring and analysis in the CRNL Tritium Laboratory. Fusion Technology, 14(2P2B), pp.1061-1065.
- Mao, F.M. and Leck, J.H., 1987. The quadrupole mass spectrometer in practical operation. Vacuum, 37(8-9), pp.669-675.