Atomic layer deposition literature review: Revision history

8 June 2023

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14 April 2023

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8 November 2022

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2 May 2022

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31 March 2022

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2 March 2022

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13 December 2021

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10 May 2021

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26 March 2021

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3 March 2021

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23 August 2016

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14 January 2013

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4 December 2012

• curprev 02:1302:13, 4 December 2012‎ Chenlong talk contribs‎ 54,480 bytes +1,448‎ /* Ultrathin Coatings on Nano-LiCoO2 for Li-Ion Vehicular ApplicationsScott, Isaac D., Yoon Seok Jung, Andrew S. Cavanagh, Yanfa Yan, Anne C. Dillon, Steven M. George, and Se-Hee Lee. “Ultrathin Coatings on Nano-LiCoO2 for Li-Ion Vehicular Applicat undo

30 November 2012

• curprev 00:5500:55, 30 November 2012‎ Chenlong talk contribs‎ 53,032 bytes +927‎ →‎This page describes selected literature available on atomic layer deposition. undo

9 November 2012

• curprev 19:4319:43, 9 November 2012‎ Chenlong talk contribs‎ 52,105 bytes +926‎ /* Atomic layer-deposited tunnel oxide stabilizes silicon photoanodes for water oxidationChen, Yi Wei, Jonathan D. Prange, Simon Dühnen, Yohan Park, Marika Gunji, Christopher E. D. Chidsey, and Paul C. McIntyre. “Atomic Layer-deposited Tunnel Oxid undo

24 October 2012

• curprev 05:1805:18, 24 October 2012‎ Chenlong talk contribs‎ 51,179 bytes +3‎ →‎Low-Temperature Al2O3 Atomic Layer DepositionGroner, M. D., F. H. Fabreguette, J. W. Elam, and S. M. George. “Low-Temperature Al2O3 Atomic Layer Deposition.” Chemistry of Materials 16, no. 4 (February 1, 2004): 639–645. undo
• curprev 05:1705:17, 24 October 2012‎ Chenlong talk contribs‎ 51,176 bytes +3,193‎ →‎Surface Chemistry for Atomic Layer GrowthGeorge, S. M., A. W. Ott, and J. W. Klaus. “Surface Chemistry for Atomic Layer Growth.” The Journal of Physical Chemistry 100, no. 31 (January 1, 1996): 13121–13131. undo
• curprev 05:1405:14, 24 October 2012‎ Chenlong talk contribs‎ 47,983 bytes +3‎ →‎Surface Chemistry for Atomic Layer GrowthGeorge, S. M., A. W. Ott, and J. W. Klaus. “Surface Chemistry for Atomic Layer Growth.” The Journal of Physical Chemistry 100, no. 31 (January 1, 1996): 13121–13131. undo
• curprev 05:1305:13, 24 October 2012‎ Chenlong talk contribs‎ 47,980 bytes −2,037‎ /* Surface chemistry of atomic layer depositionPuurunen, Riikka L. “Surface Chemistry of Atomic Layer Deposition: A Case Study for the Trimethylaluminum/water Process.” Journal of Applied Physics 97, no. 12 (June 30, 2005): 121301–121301–52. undo
• curprev 05:1105:11, 24 October 2012‎ Chenlong talk contribs‎ 50,017 bytes +3,443‎ /* Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substratesLamagna, L., M. Fusi, S. Spiga, M. Fanciulli, G. Brammertz, C. Merckling, M. Meuris, and A. Molle. “Effects of Surface Passivation During Atomic L undo

16 October 2012

• curprev 05:0305:03, 16 October 2012‎ Chenlong talk contribs‎ 46,574 bytes −238‎ →‎Atomic Layer Deposition: An OverviewGeorge, Steven M. “Atomic Layer Deposition: An Overview.” Chemical Reviews 110, no. 1 (January 13, 2010): 111–131. undo
• curprev 05:0205:02, 16 October 2012‎ Chenlong talk contribs‎ 46,812 bytes +8,889‎ →‎Atomic Layer Deposition: An OverviewGeorge, Steven M. “Atomic Layer Deposition: An Overview.” Chemical Reviews 110, no. 1 (January 13, 2010): 111–131. undo

3 October 2012

• curprev 22:2722:27, 3 October 2012‎ Chenlong talk contribs‎ 37,923 bytes +23,880‎ →‎This page describes selected literature available on atomic layer deposition. undo
• curprev 22:2022:20, 3 October 2012‎ Chenlong talk contribs‎ 14,043 bytes +8,839‎ →‎This page describes selected literature available on atomic layer deposition. undo
• curprev 02:3202:32, 3 October 2012‎ Chenlong talk contribs‎ 5,204 bytes +1,644‎ →‎This page describes selected literature available on atomic layer deposition. undo

2 October 2012

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