Search Terms
- "storage box" AND particles AND cleanroom
Organic airborne contamination on Si wafers
Walter Dena, Hsunling Bai, and Yuhao Kang, “[http://jes.ecsdl.org/content/153/2/G149.full Organic Airborne Molecular Contamination in Semiconductor Fabrication Clean Rooms A Review]” Journal of The Electrochemical Society, 153(2), G149-G159, 2006.
Yong-Jun Liu and Hua-Zhong Yu, “Effect of Organic Contamination on the Electrical Degradation of Hydrogen-Terminated Silicon upon Exposure to Air under Ambient Conditions” Journal of The Electrochemical Society, 150(12), G861-G865, 2003.
Hitoshi Habuka, Syuichi Ishiwari, Haruo Kato, Manabu Shimada, and Kikuo Okuyamad, “Airborne Organic Contamination Behavior on Silicon Wafer Surface” Journal of The Electrochemical Society, 150(2), G148-G154, 2003.
Syuichi Ishiwari, Haruo Kato, and Hitoshi Habuka, “Development of Evaluation Method for Organic Contamination on Silicon Wafer Surfaces” Journal of The Electrochemical Society, 148(11), G644-G648, 2001.
Hitoshi Habuka, Manabu Shimada and Kikuo Okuyama, “Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface” Journal of The Electrochemical Society, 148(7), G365-G369, 2001.
Fumitoshi Sugimoto and Sigeru Okamura, “Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface” Journal of The Electrochemical Society, 146(7), 2725-2729, 1999.
Koichiro Saga and Takeshi Hattori, “Identification and Removal of Trace Organic Contamination on Silicon Wafers Stored in Plastic Boxes” Journal of The Electrochemical Society, 143(10), 3279-3284, 1996.
K. J. Budde, W. J. Holzapfel, and M. M. Beyer , “Application of Ion Mobility Spectrometry to Semiconductor Technology: Outgassings of Advanced Polymers under Thermal Stress” Journal of The Electrochemical Society, 142(3), 888-897, 1995.
- Outgassing characteristics of PP, PC, PFA, PVDF, ABS and PTFE