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# Turn off the residual gas analyzer (RGA) | # Turn off the residual gas analyzer (RGA) | ||
# Close the backing line for the load-lock turbo-molecular pump (TMP) | # Close the backing line for the load-lock turbo-molecular pump (TMP) | ||
# Bleed out the manifold | # Bleed out the manifold, open the leak valve to 10 Pa until the leak valve is completely open | ||
# Close the leak valve | |||
# Close the leak valve | |||
# Open the N2 valve on the gas manifold | # Open the N2 valve on the gas manifold | ||
# Slowly open the leak valve until the plasma chamber pressure monitor gives a low reading | # Slowly open the leak valve until the plasma chamber pressure monitor gives a low reading |