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# Turn off the main chamber ion pump | # Turn off the main chamber ion pump | ||
# Turn off the main chamber ion gauge | # Turn off the main chamber ion gauge | ||
# | # Press the IG1 button on the gauge panel | ||
# Turn off the residual gas analyzer (RGA) | # Turn off the residual gas analyzer (RGA) | ||
# Close the backing line for the load-lock turbo-molecular pump (TMP) | # Close the backing line for the load-lock turbo-molecular pump (TMP) |