The edit can be undone. Please check the comparison below to verify that this is what you want to do, and then publish the changes below to finish undoing the edit.
Latest revision | Your text | ||
Line 306: | Line 306: | ||
# Open the load-lock to the main-chamber by opening the gate valve | # Open the load-lock to the main-chamber by opening the gate valve | ||
# Adjust the substrate heater angle to approximately 135º with the adjustment dial | # Adjust the substrate heater angle to approximately 135º with the adjustment dial | ||
# Push in the transfer arm | # Push in the transfer arm | ||
# Align the substrate holder pins with the receiving brackets on the transfer arm | # Align the substrate holder pins with the receiving brackets on the transfer arm |