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* The lower the vapor pressure and/or smaller the molecular weight of the contaminant compounds, the more easily they will adsorb onto the surface. | * The lower the vapor pressure and/or smaller the molecular weight of the contaminant compounds, the more easily they will adsorb onto the surface. | ||
* H2SO4/H2O2 and HNO3 could not completely remove a monolayer of organic contaminants. Dilute HF and O3/H2O succeeded in this. Reasons for these discussed in the paper, relates to the polarity of the molecules. | * H2SO4/H2O2 and HNO3 could not completely remove a monolayer of organic contaminants. Dilute HF and O3/H2O succeeded in this. Reasons for these discussed in the paper, relates to the polarity of the molecules. | ||
=== K. J. Budde, W. J. Holzapfel, and M. M. Beyer , “[http://jes.ecsdl.org/content/142/3/888.short Application of Ion Mobility Spectrometry to Semiconductor Technology: Outgassings of Advanced Polymers under Thermal Stress]” ''Journal of The Electrochemical Society'', '''142'''(3), 888-897, 1995. === | === K. J. Budde, W. J. Holzapfel, and M. M. Beyer , “[http://jes.ecsdl.org/content/142/3/888.short Application of Ion Mobility Spectrometry to Semiconductor Technology: Outgassings of Advanced Polymers under Thermal Stress]” ''Journal of The Electrochemical Society'', '''142'''(3), 888-897, 1995. === |