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* Traditional way to measure organic contamination really complex (WTD-GC-MS or TOF SIMS) | * Traditional way to measure organic contamination really complex (WTD-GC-MS or TOF SIMS) | ||
* In this developed method, TD-GC-MS (thermal desorption gas chromatography mass spectrometry) is still used, but one heating step is removed. Contamination is evaluated directly from the Si plate, and additional exposure to cleanroom air is prevented. | * In this developed method, TD-GC-MS (thermal desorption gas chromatography mass spectrometry) is still used, but one heating step is removed. Contamination is evaluated directly from the Si plate, and additional exposure to cleanroom air is prevented. | ||
* Time-dependent behavior of contamination adsorption is evaluated by | * Time-dependent behavior of contamination adsorption is evaluated by MOSAIC model. | ||
=== Hitoshi Habuka, Manabu Shimada and Kikuo Okuyama, “[http://jes.ecsdl.org/content/148/7/G365.full Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface]” ''Journal of The Electrochemical Society'', '''148'''(7), G365-G369, 2001. === | === Hitoshi Habuka, Manabu Shimada and Kikuo Okuyama, “[http://jes.ecsdl.org/content/148/7/G365.full Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface]” ''Journal of The Electrochemical Society'', '''148'''(7), G365-G369, 2001. === |