Metalorganic Vapour Phase Epitaxy
From Appropedia
Metalorganic Vapour Phase Epitaxy- is a method of creating controllable epitaxial layered structures by atomic deposition over a substrate material. A substrate wafer is placed on a graphite susceptor and heated in a reaction vessel. Compounds are grown in a hydrogen atmosphere and then form epitaxial layers on the substrate as they decompose.
 | Information on Metalorganic Vapour Phase Epitaxy can be found at Wikipedia. What's this? |
