{"Page URL":"https://www.appropedia.org/UV_Lithography_Mask_Holder","Page affiliations":"Category:Aalto University","Page description":"Enabling UV lithography off the clean room facility, to provide a wider range of photoactive material possibility, a wider range of substrates, faster work cycles and reduced cost.","Page image":"File:20180423142628!1.jpg","Page is part of":"L3999","Page language":"en","Page license":"CC-BY-SA-3.0","Page title":"UV Lithography Mask Holder","Page views":"176","Page year":"Sunday, 01-Jan-17 00:00:00 UTC","Modification date":"Thursday, 27-Nov-25 23:22:58 UTC"}