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Vapor Deposition of thin Films - Revision history
2024-03-28T16:28:04Z
Revision history for this page on the wiki
MediaWiki 1.39.6
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Sophivorus: Text replacement - "| affiliations = " to "| organizations = "
2024-02-28T16:14:12Z
<p>Text replacement - "| affiliations = " to "| organizations = "</p>
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Sophivorus: Replace references template for plain references tag per better compatibility with visual editor and other software
2023-06-09T19:57:21Z
<p>Replace references template for plain references tag per better compatibility with visual editor and other software</p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 19:57, 9 June 2023</td>
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Sophivorus: Text replacement - "| status = Implemented" to "| status = Deployed"
2023-02-17T15:45:51Z
<p>Text replacement - "| status = Implemented" to "| status = Deployed"</p>
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Irene92: /* Contamination */
2022-10-07T07:57:29Z
<p><span dir="auto"><span class="autocomment">Contamination</span></span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 07:57, 7 October 2022</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== Contamination ===</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== Contamination ===</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>Byproduct contamination within the deposition chamber results from poor internal ventilation. Byproduct material gets caught in valves crystallizes around valves and other moving parts which lead to machine upkeep and longer downtime. Material also crystallizes after it coats these moving parts and than reenters where the precursor material is converting to a film and contaminates the process leading to lower efficiency. The crystalline byproducts that deposit inside the entire vacuum system need to be addressed.<ref name="seven">Solid State technology. "Etch and CVD process improvments". [https://web.archive.org/web/20090420203519/http://www.solid-state.com:80/display_article/87675/5/none/none/Feat/-Etch-and-CVD-process-improvements-via-heated-vacuum-throttle-valve http://web.archive.org/web/20090420203519/http://www.solid-state.com:80/display_article/87675/5/none/none/Feat/-Etch-and-CVD-process-improvements-via-heated-vacuum-throttle-valve] (7),<ref></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>Byproduct contamination within the deposition chamber results from poor internal ventilation. Byproduct material gets caught in valves crystallizes around valves and other moving parts which lead to machine upkeep and longer downtime. Material also crystallizes after it coats these moving parts and than reenters where the precursor material is converting to a film and contaminates the process leading to lower efficiency. The crystalline byproducts that deposit inside the entire vacuum system need to be addressed.<ref name="seven">Solid State technology. "Etch and CVD process improvments". [https://web.archive.org/web/20090420203519/http://www.solid-state.com:80/display_article/87675/5/none/none/Feat/-Etch-and-CVD-process-improvements-via-heated-vacuum-throttle-valve http://web.archive.org/web/20090420203519/http://www.solid-state.com:80/display_article/87675/5/none/none/Feat/-Etch-and-CVD-process-improvements-via-heated-vacuum-throttle-valve] (7),<<ins style="font-weight: bold; text-decoration: none;">/</ins>ref></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* It reduces the conductance of the vacuum pumping line, which slows down the process and reduces the system's throughput.<ref name="seven" /></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* It reduces the conductance of the vacuum pumping line, which slows down the process and reduces the system's throughput.<ref name="seven" /></div></td></tr>
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Irene92
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Irene92: /* Processing */
2022-10-07T07:56:46Z
<p><span dir="auto"><span class="autocomment">Processing</span></span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 07:56, 7 October 2022</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>Precursor material enters the chamber by fluid force flow. Inert gas follows flows along streamlines by diffusion within the chamber. Deposition reactions are driven by concentration gradient within the reaction chamber. Ionized material diffuse through the boundary layers of the substrate and the first film is build. After initial deposition occur molecular byproducts are formed and de-absorption occurs as the excess material and byproducts flows are sucked out of the chamber.<ref name="five">Mattox. D,M. 1998 William Publishing." Handbook of Physical Vapor Deposition(PVD) Processing ",.http://www.knovel.com.proxy.queensu.ca/web/portal/basic_search/display?_EXT_KNOVEL_DISPLAY_bookid=63(5),<ref></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>Precursor material enters the chamber by fluid force flow. Inert gas follows flows along streamlines by diffusion within the chamber. Deposition reactions are driven by concentration gradient within the reaction chamber. Ionized material diffuse through the boundary layers of the substrate and the first film is build. After initial deposition occur molecular byproducts are formed and de-absorption occurs as the excess material and byproducts flows are sucked out of the chamber.<ref name="five">Mattox. D,M. 1998 William Publishing." Handbook of Physical Vapor Deposition(PVD) Processing ",.http://www.knovel.com.proxy.queensu.ca/web/portal/basic_search/display?_EXT_KNOVEL_DISPLAY_bookid=63(5),<<ins style="font-weight: bold; text-decoration: none;">/</ins>ref></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Energy Reactions'''</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Energy Reactions'''</div></td></tr>
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Irene92
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Irene92: /* Processing */
2022-10-07T07:55:54Z
<p><span dir="auto"><span class="autocomment">Processing</span></span></p>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* 1)Mass transport-Fluid flow and diffusion</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* 1)Mass transport-Fluid flow and diffusion</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* 2a)Energy Reactions</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* 2a)Energy Reactions</div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* 2b)Chemical Reaction (Phase Chemistry)<ref name="six">TimeDomain CVD, Inc."CVD Process in its entirety",http://www.timedomaincvd.com/CVD_Fundamentals/Fundamentals_of_CVD.html (6),<ref></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* 2b)Chemical Reaction (Phase Chemistry)<ref name="six">TimeDomain CVD, Inc."CVD Process in its entirety",http://www.timedomaincvd.com/CVD_Fundamentals/Fundamentals_of_CVD.html (6),<<ins style="font-weight: bold; text-decoration: none;">/</ins>ref></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>[[File:apparatus.jpg|thumb|Figure 4. Apparatus for Vapor Deposition]]</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>[[File:apparatus.jpg|thumb|Figure 4. Apparatus for Vapor Deposition]]</div></td></tr>
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Irene92
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Irene92: /* Physical Vapor Deposition */
2022-10-07T07:55:31Z
<p><span dir="auto"><span class="autocomment">Physical Vapor Deposition</span></span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 07:55, 7 October 2022</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== Physical Vapor Deposition ==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== Physical Vapor Deposition ==</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>PVD utilizes the principals of thermodynamic by focusing concentrated forms of energy on a solid precursor material. This solid precursor material becomes excited through energy bombardment; Magnetic sputtering, lasers, Arc evaporation. Energy causes bonds to break in the crystal lattice structure and atoms becomes ionized as they are dislodge from the precursor material.<ref name="two">PVD-Coatings. "A theory of PVD coatings", http://www.pvd-coatings.co.uk/theory.htm,(2),</ref>The ionized material is released and is transferred by pressure gradient to where it is deposited as a thin film on the substrate material..<ref name="four">Azom - Materials "Physical Vapor Deposition (PVD) an introduction ", http://www.azom.com/Details.asp?ArticleID=1558(4),<ref></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>PVD utilizes the principals of thermodynamic by focusing concentrated forms of energy on a solid precursor material. This solid precursor material becomes excited through energy bombardment; Magnetic sputtering, lasers, Arc evaporation. Energy causes bonds to break in the crystal lattice structure and atoms becomes ionized as they are dislodge from the precursor material.<ref name="two">PVD-Coatings. "A theory of PVD coatings", http://www.pvd-coatings.co.uk/theory.htm,(2),</ref>The ionized material is released and is transferred by pressure gradient to where it is deposited as a thin film on the substrate material..<ref name="four">Azom - Materials "Physical Vapor Deposition (PVD) an introduction ", http://www.azom.com/Details.asp?ArticleID=1558(4),<<ins style="font-weight: bold; text-decoration: none;">/</ins>ref></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br/></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== Chemical Vapor Deposition ==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>== Chemical Vapor Deposition ==</div></td></tr>
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Irene92
https://www.appropedia.org/w/index.php?title=Vapor_Deposition_of_thin_Films&diff=657565&oldid=prev
Irene92: Normalize
2022-10-07T07:54:53Z
<p>Normalize</p>
<a href="https://www.appropedia.org/w/index.php?title=Vapor_Deposition_of_thin_Films&diff=657565&oldid=624191">Show changes</a>
Irene92
https://www.appropedia.org/w/index.php?title=Vapor_Deposition_of_thin_Films&diff=624191&oldid=prev
Sophivorus: Text replacement - "{{Reflist" to "{{References"
2022-05-07T14:13:23Z
<p>Text replacement - "{{Reflist" to "{{References"</p>
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Sophivorus
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Sophivorus: Text replacement - "{{Project data([^}]+)}}\n*{{Location data\n*\| ?location ?= ?([^}]+)}}" to "{{Project data$1| location =$2}}"
2022-05-02T16:30:00Z
<p>Text replacement - "{{Project data([^}]+)}}\n*{{Location data\n*\| ?location ?= ?([^}]+)}}" to "{{Project data$1| location =$2}}"</p>
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Sophivorus