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Difference between revisions of "Spin coater Literature Review"

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This page is part of a course at [[MTU|Michigan Tech]] under [[User:J.M.Pearce|Dr. Pearce]].
 
This page is part of a course at [[MTU|Michigan Tech]] under [[User:J.M.Pearce|Dr. Pearce]].

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Literature

Spin coater based on brushless dc motor of hard disk drives

R. F. Bianchi, M. F. Panssiera, J. P. H. Lima, L. Yagura, A. M. Andrade, and R. M. Faria, “Spin coater based on brushless dc motor of hard disk drivers,” Progress in Organic Coatings, vol. 57, no. 1, pp. 33–36, Sep. 2006.

This paper presents development of a novel programmable, low cost, spin coater to be used for applications where flat substrates are coated with an uniform thin layer of a desirable material. The equipment is built with dc brushless motor present in most of the hard disk drivers (HDDs). The system offers manual control, wide speed range (from 0 to 10,000 rpm), spin speed stability and compact size. The paper also describes the use of such equipment for the fabrication of thin poly(o-methoxyaniline) (POMA) films, which are of particular interest for design organic electronic devices, such as diodes, transistor, sensors and displays.

Notes:

  • Easy to use, safe and inexpensive
  • Manual control, wide speed range and spin speed stability
  • Implemented using Brushless motor
  • Controlled by Arduino circuit

Plate whirler (Publication No: US 2386591 A)

Campbell James T, year=1945, month=oct # "~9", publisher=Google Patents

Notes:

  • Complete manual operation for flow and temperature control
  • First invention
  • used in photo reproduction processes

Centrifugal apparatus for slide staining (Publication No: US 3352280 A)

R, H.W. and Hughes, R., year=1967, month=nov # "~14", publisher=Google Patents

The primary object of the invention is to provide apparatus in which a plurality of slides may be stained automatically `without `being handled but for inserting and removing them from the apparatus, the staining being done completely automatically, quickly, and with great saving of the solution.

Notes:

  • More uniform distribution of the solution when compared to manual slide staining

Apparatus for coating memory discs with oxide or like film (Publication No: US 3537425 A)

W, D.C. and A, M.E., year=1970, month=nov # "~3", publisher=Google Patents

Apparatus for spraying discs including a rotatable disc support located within a coating chamber. Arm means are pivoted within the chamber for swinging a mask from a remote position to a position above the disc located in the support. Nozzle means are movably mounted adjacent the support for spraying portions of the disc exposed by the mask.

Method and apparatus for developing resist film including a movable nozzle arm (Publication No: US 4564280 A)

Fukuda, Y., year=1986, month=jan # "~14", publisher=Google Patents

An apparatus for developing a resist film coated on a rotatable base plate, comprising means for supporting and rotating the base plate and nozzle means for feeding a developer onto the resist film. The nozzle means comprises a nozzle arm extending over the base plate and having a plurality of nozzles arranged along the length of the nozzle arm. Disclosed also is a method for developing a resist film coated on a rotatable base plate with a developer fed from a plurality of nozzles arranged on a nozzle arm along the length of the nozzle arm. The method comprises feeding the developer from th respective nozzles onto the resist film while rotating the base plate and while scanning the nozzle arm over the resist film.

Spin Coater (Publication No: US 4895102 A)

Kachel, T.V. and Rydeen, C.F. and Millar, R.W. and Dawson, R.C. and Griffith, R.L. and Weitzel, W.H.,year=1990, month=jan # "~23", publisher= Google Patents

A spin coater suitable for spin coating spectacle lens molds with polymerizable coating composition. The spin coater includes a drawer which rotatably mounts at least one chuck thereon, which drawer is slidable between a front and rear position within a housing to sequentially allow application of a coating by the spinning chucks in the front chamber of the housing, followed by polymerization thereof in the rear chamber. Each chuck of the spin coater is provided with a mold seat defined by a ledge and adjacent lip, the lip automatically centering the mold in the seat axis by virtue of its dimensions in relation to the mold. The chuck also has a lengthwise resilient vacuum conduit, preferably in the form of a bellows, which has an open end which can sealingly engage against a seated mold, such that when a vacuum is applied through the vacuum conduit the mold is urged firmly against the ledge of the mold seat. A method of producing a coated spectacle lens, preferably using such a spin coater, involves providing two different abrasion resistent coatings on front and rear molding surfaces of a form, which coatings are only partially polymerized. The form is then filled with resin which is cured and the coated formed lens is separated from the form. The coatings on the lens are then preferably further polymerized by exposure to actinic light.

Coating equipment (Publication No: US 5143552 A)

Masahi Moriyama, year=1992, month=sep # "~1", publisher=Google Patents

Coating equipment, which is installed in a clean room where air flows in a vertical laminar flow, comprises coating apparatus, for applying a resist, having a spin chuck connected to a motor and used to hold a semiconductor wafer and a cup with an inlet port to draw in a vertical laminar flow from the clean room and enclosing the wafer held on the spin chuck, and a control apparatus to control the temperature and humidity of the vertical laminar flow supplied to the coating apparatus. A vertical laminar flow control in temperature and humidity by the control apparatus is always supplied to the wafer in the cup during the coating process of a semiconductor wafer.

References