Molecular beam epitaxyW is a method of thin film deposition that is useful for fabricating high performance photovoltaic devices.

Existing Equipment

Michigan Tech's MBE as discovered in 2011

Built in the early 1990's Michigan Tech's MBE system provided staff and students the ability to deposit thin high purity films under ultra high vacuumW(UHV) conditions. The system saw use up until April of 2001, where it was left under UHV and powered down. Now in late 2011, over a decade later, the chamber has since achieved atmospheric pressure and is now undergoing the process of reconditioning to bring the system online once again.

The original build of Michigan Tech's MBE was completed in 1993 using ISA Riber, SVT Associates, Thermionics, k-Space, and Inficon components.

MBE Diagram similar to MTU's current model
Note: Diagram shown is a similar model to that of MTU's with the only known deviation from the diagram being the lack of the CF100 roof-top flange.

ISA RIBER MBE 32 Growth/Evaporation Chamber

The RIBER MBE 32 system is a highly flexible and efficient 3" single-wafer epi reactor, which provides all the necessary MBE tools and in-situ characterization capabilities to achieve state-of-the-art epitaxy of III-Vs, II-VIs, MCTs, nitrides and silicon alloys. The 8 cell ports are grouped together on the evaporation flange, which also includes a cryogenic panel completely surrounding all the hot parts of the cells, ensuring maximum trapping of all residual species. This flange can be specifically adapted for the growth of mercury compounds or the nitrides of group III elements. The pumping system, which can include several types of pump, is adapted to each particular application. Introduction of samples is implemented by the use of: (1) loadlock chambers (R&D systems), or (2) modular transfer modules, enabling the addition of chambers for specific treatments (metallization, pre-treatment, sampling, analysis, outgassing, etc.). Gas-source MBE and CBE configurations combining the use of solid sources and/or gas sources are also available. It is a flexible and modular MBE research system.

ISA RIBER Model 28848 Evaporation Chamber

ISA RIBER Model 33890 Evaporation Flange

Cryopanels

Within the MBE growth chamber, two cryopanels are fixed to the inside of the source flange. One panel consists of a cell cryoshroud which is a double-walled, lens-shaped assembly. This assembly has tubes placed inside for the effusion cells (Model ABN-135L for MTU's). Each tube is completely surrounded for its entire length by liquid nitrogen to condense gases emitted by the cells and to thermally isolate each cell. The cell hot zone is protected by a 77K shield. The second and main cryopanel attached to the source flange via supports. This cryopanel is manufactured with the same construction as the effusion cell panel which provides a completely flooded LN2 cryoshroud. The effusion cell panel allows for cell idling at 800°C during bake-out for example, without any damage done to the cryoshroud while not using LN2. Each panel has a separate all metal liquid nitrogen input and output for the ability of sequential cooling.

ISA RIBER Model 16TTD Shutters

Previously, Michigan Tech's MBE system was using Model 16TTD manual shutters provided by ISA Riber when the system was originally purchased.

Bimba Pneu-Turn Actuators
MTU Pneumatic Shutter Actuators

At a later date, pneumatic rotary actuators(Bimba Pneu-Turn) were purchased. Presently, while not kept on the MBE system, the rotary actuators have been found and tested. All nine actuators have been deemed in to be in working condition and will be installed.

Humphrey Raceway 410 Series Solenoid Valve

Along with the actuators, a Humphrey Raceway solenoid valve was previously purchased. This unit consists of nine(9) dual-use solenoids and a valve body capable of supporting nine actuators. Status: This unit is being refurbished and computer interfaced at MTU.

ISA RIBER Model ARM-3 Manipulator

MTU RIBER 3" Manipulator
ISA RIBER Model MOB-300M Molybdenum Mounting Block

Specifically made for use with 3" diameter substrates.

ISA RIBER PI-400-TTZ Ion Pump

ISA RIBER 401-1000 Ion Pump Power Supply

ISA RIBER PF-6 Titanium Sublimator

ISA RIBER Model 304-6 Titanium Sublimator Power Supply

Supplies power for Titanium filaments. 0 to 60 Amp selectable for 1 of 6 filaments and operates at 220V (50/60 Hz).

ISA RIBER Model JBA 12-1 Bayard-Alpert Ion Gauge

RIBER Model 307S2 Electrometer

Sources

Michigan Tech's ABN 135L Effusion Cells
RIBER ABN 135L Effusion Cell Diagram

During the MBE's use at Michigan tech the sources that have been used in the effusion cells include silver(Ag), molybdenum(Mo), germanium(Ge), tin(Sn), iron(Fe), nickel(Ni), copper(Cu), silicon(Si) and carbon(C). However, the silicon and carbon sources were changed to the electron beam evaporating systems provided by SVT Associates roughly two years after completion of the MBE, in 1995.

Presently, MTU has six(6) ABN 135L effusion cells and two(2) SVTA electron beam evaporating sources.

ISA RIBER ABN 135L Effusion Cells

CELL TYPE SOLID SOURCE
MOUNTING FLANGE CONFLAT 2" 3/4 O.D. CF 35
KNIFE EDGE TO LIP LENGTH 283.5 mm
EXTERNAL SHIELD DIAMETER 37.2 mm
BAKEOUT TEMPERATURE 250°C
CAPACITY 39 cc
CRUCIBLE INTERNAL LIP DIAMETER 23.6 mm
CRUCIBLE INTERNAL LENGTH 88.9 mm
CRUCIBLE MATERIAL PBN (pyrolytic boron nitride)
TEMPERATURE RANGE 0 - 1400°C
TEMPERATURE STABILITY < 0.4°C
THERMOCOUPLE TYPE WRe 5/26
HEATING MODE JOULE EFFECT / RADIATION
HEATING ASSEMBLY MATERIALS Mo - Ta - PBN
FILAMENT TYPE FLAT FOIL
MAXIMUM TEMPERATURE 1500°C
ISA RIBER TC 194 Temperature Control Units
MTU RIBER TC 194 Temperature Controllers











TDK-Lambda EMS 30-33 1000W (1kW) AC to DC Power Supply
MTU TDK EMS 30-33 Power Supplies
Michigan Tech currently has five(5) of these power supplies on hand, of which four are being utilized in the present
configuration for heating the manipulator and sources/cells. Current listed specifications are:


AC Input 1 kW models:

115 VAC (standard), 220 VAC (optional) single phase; All models 50/60 Hz

Rated Power (Watts) 1000W (1kW)
Output Voltage (Volts) 0 - 30V
Output Current (Amps) 0 - 33A
Output Ripple (mV) p-p Carrier 75mV
Output Characteristics Regulation: 0.1%

Stability: 0.05%

Transient response: 650 microseconds for 30% load change (models up to 20 VDC)

Operating temperature: 0-50 Deg C full output, derate above 50 Deg C

Protective Features Overvoltage (up to 300 VDC outputs)

Overtemperature

Overcurrent

Programming Front panel controls and remote analog resistance, voltage and current programming

SVT Associates EBS-4 Electron Beam Evaporator

SVTA 3kW Power Supply

RHEED Gun & CCD Camera

Perkin-Elmer Model 06-190 10keV HEED Gun

Perkin-Elmer 20-330 RHEED Gun Control

K-Space (KSA) BP-M1 CCD Camera

KSA 300/400 Software

INFICON Transpector TH100 F&M Quadrupole Residual Gas Analyzer

Transpector Ware V2.0 Software

ISA RIBER Model 28800 Loading/Introduction Chamber

VME 38 Roughing Pump Valve

Thermionics Northwest EM201.8-8-8B XYZ Manipulators

ISA RIBER TLTM 63/700 Linear and Rotary Motion Feedthrough

Diagram of TLTM 63/700 is available here: TLTM 63/700

ISA RIBER PEG-1000S Titanium Sublimation Pump

ISA RIBER Model 304-4 Titanium Sublimator Power Supply

MTU Titanium Sublimation Power Supplies
















ISA RIBER Mobel JBA 307 S0/2 Electrometers

MTU JBA 307 Series Electrometers

ISA RIBER LPP-3M Roughing System

ISA RIBER PSM 2 Mechanical Roughing Pump

ISA RIBER PA 10 L Sorption Pumps

Viton VV40L Valves

ISA RIBER JTC 6 T Thermocouple Gauge

ISA RIBER JTC 6 C Power Supply

Component Suppliers

ISA Riber Company - Riber's Website

SVT Associates, Inc. - SVT's Website

k-Space Associates, Inc. - KSA's Website

TLI Enterprises, Inc. "Thermionics" - Thermionic's Website

Inficon - Inficon's Website

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