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==Figures of Merit for GaN substrates== | ==Figures of Merit for GaN substrates== | ||
Line 14: | Line 11: | ||
! Reference/hyperlink | ! Reference/hyperlink | ||
|- | |- | ||
| rowspan=" | | rowspan="27"| GaN freestanding substrate | ||
| Bandgap(300K)<br /> | | Bandgap(300K)<br /> | ||
| eV<br /> | | eV<br /> | ||
| PL<br /> | | PL<br /> | ||
| 3.44<br /> | | 3.44[1,2]<br /> | ||
| <br /> | | <br /> | ||
| http://www.springer.com/materials/book/978-3-642-04828-9<br /> | | (1)http://www.springer.com/materials/book/978-3-642-04828-9<br />(2)[http://www.qualitymaterial.net/GaN-substrate.html Xiamen Powerway Advanced Material Co. Ltd.] | ||
|- | |- | ||
| Electron mobility<br /> | | Electron mobility(300K)<br /> | ||
| cm<sup>2</sup>/V s<br /> | | cm<sup>2</sup>/V s<br /> | ||
| Hall effect sensor<br /> | | Hall effect sensor<br /> | ||
| ~150( | | ~150[1],~250[2]<br />1350[4]<br/>150(for n=10<sup>19</sup>)[3]<br/>240(for n=10<sup>18</sup>)[3]<br/>500(for n=10<sup>17</sup>)[3]<br /> | ||
| <br /> | | <br /> | ||
| (1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br /> | | (1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br />(2)[http://ammono.com/files/products/Ammono_GaN_High_Transparency_n-type_substrates_v_20110906.pdf Ammono S. A.]<br/>(3)[http://www.qualitymaterial.net/GaN-substrate.html Kyma Technologies]<br/>(4)http://www.springer.com/materials/book/978-3-642-04828-9<br /> | ||
|- | |- | ||
| Hole mobility<br /> | | Hole mobility(300K)<br /> | ||
| cm<sup>2</sup>/V s<br /> | | cm<sup>2</sup>/V s<br /> | ||
| Hall effect sensor<br /> | | Hall effect sensor<br /> | ||
| 13 | | 13[1]<br /> | ||
| <br /> | | <br /> | ||
| http://www.springer.com/materials/book/978-3-642-04828-9<br /> | | (1)http://www.springer.com/materials/book/978-3-642-04828-9<br /> | ||
|- | |- | ||
| Melting point<br /> | | Melting point<br /> | ||
| K<br /> | | K<br /> | ||
| Thermal couple<br /> | | Thermal couple<br /> | ||
| 2573<br /> | | 2573[1]<br /> | ||
| <br /> | | <br /> | ||
| http://www.springer.com/materials/book/978-3-642-04828-9<br /> | | (1)http://www.springer.com/materials/book/978-3-642-04828-9<br /> | ||
|- | |- | ||
| Lattice constants<br /> | | Lattice constants<br /> | ||
| nm<br /> | | nm<br /> | ||
| X-ray diffraction<br /> | | X-ray diffraction<br /> | ||
| a=0.319;c=0.518<br /> | | a=0.319;c=0.518[1]<br />a=0.3189;c=0.5185[2]<br /> | ||
| <br /> | | <br /> | ||
| http://www.springer.com/materials/book/978-3-642-04828-9<br /> | | (1)http://www.springer.com/materials/book/978-3-642-04828-9<br />(2)[http://www.qualitymaterial.net/GaN-substrate.html Kyma Technologies]<br/> | ||
|- | |- | ||
| Thermal conductivity(300K)<br /> | | Thermal conductivity(300K)<br /> | ||
| W/cm K<br /> | | W/cm K<br /> | ||
| Time-domain thermoreflectance<br /> | | Time-domain thermoreflectance<br /> | ||
| 2. | | 2.0-2.4[1]<br /> | ||
| <br /> | | <br /> | ||
| (1)[http://www.qualitymaterial.net/GaN-substrate.html Kyma Technologies]<br /> | |||
|- | |- | ||
| Heat capacity<br /> | | Heat capacity<br /> | ||
| J/mol K<br /> | | J/mol K<br /> | ||
| Constant presure heating<br /> | | Constant presure heating<br /> | ||
| 35.3<br /> | | 35.3[1]<br /> | ||
| <br /> | | <br /> | ||
| http://www.springer.com/materials/book/978-3-642-04828-9<br /> | | (1)http://www.springer.com/materials/book/978-3-642-04828-9<br /> | ||
|- | |- | ||
| Elastic modulus<br /> | | Elastic modulus<br /> | ||
| GPa<br /> | | GPa<br /> | ||
| Mechanical measurement<br /> | | Mechanical measurement<br /> | ||
| 210 | | 210[1]<br /> | ||
| <br /> | | <br /> | ||
| (1)http://www.springer.com/materials/book/978-3-642-04828-9<br /><br /> | |||
|- | |- | ||
| Dislocation density<br /> | | Dislocation density<br /> | ||
| /cm<sup>2</sup><br /> | | /cm<sup>2</sup><br /> | ||
| TEM and XRD<br /> | | TEM and XRD<br /> | ||
| ≤5 x 10<sup>6</sup><br /> | | ~5x10<sup>4</sup>[1]<br/>≤5 x 10<sup>6</sup>[2]<br />1x10<sup>7</sup>-4x10<sup>7</sup>[3] | ||
| <br /> | | <br /> | ||
| http://www. | | (1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br />(2)[http://www.luxmaterial.com/en/products-132941-0-item-164128.html?backurl=/en/products-132941-38872.html Lux Material Co., Ltd.]<br/>(3)[http://www.photonic.saint-gobain.com/GaN-Free-Standing.aspx Saint-Gobain Crystals - Photonic Materials] | ||
|- | |- | ||
| Sheet carrier density<br /> | | Sheet carrier density<br /> | ||
Line 88: | Line 85: | ||
| rowspan="3"|ohm-cm<br /> | | rowspan="3"|ohm-cm<br /> | ||
| rowspan="3"|<br /> | | rowspan="3"|<br /> | ||
| 0.1-1(Undoped)<br /> | | 0.1-1(Undoped)[3]<br /> | ||
| <br /> | | <br /> | ||
| rowspan="3"|<br /> | | rowspan="3"|(1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br/>(2)[http://ammono.com/files/products/Ammono_GaN_Ultra_High_Resistivity_SI_substrates_v_20110906.pdf Ammono S. A.]<br/>(3)[http://www.luxmaterial.com/en/products-132941-0-item-164128.html?backurl=/en/products-132941-38872.html Lux Material Co., Ltd.]<br/>(4)[http://www.photonic.saint-gobain.com/GaN-Free-Standing.aspx Saint-Gobain Crystals - Photonic Materials] | ||
|- | |- | ||
| <0.01(N type)<br /> | | 10<sup>-3</sup>-10<sup>-2</sup>(N type)[1]<br/><0.01(N type)[3]<br /><0.03[4] | ||
| <br /> | | <br /> | ||
|- | |- | ||
| >10<sup>6</sup>(Semi insulating)<br /> | | 10<sup>9</sup>-10<sup>12</sup>[2]<br/>>10<sup>6</sup>(Semi insulating)[3]<br /> | ||
| <br /> | | <br /> | ||
|- | |- | ||
| rowspan="2"| | | rowspan="2"| Carrier concentration<br /> | ||
| rowspan="2"| /cm<sup>3</sup><br /> | | rowspan="2"| /cm<sup>3</sup><br /> | ||
| rowspan="2"| SIMS<br /> | | rowspan="2"| SIMS<br /> | ||
| ~10<sup>19</sup>(N type)[1]<br /> | | ~10<sup>19</sup>(N type)[1]<br />3x10<sup>17</sup>(N type)[2]<br/>1x10<sup>18</sup>-3x10<sup>18</sup>(N type)[3] | ||
|<br /> | |<br /> | ||
| rowspan="2"| (1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br /> | | rowspan="2"| (1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br />(2)[http://ammono.com/files/products/Ammono_GaN_High_Transparency_n-type_substrates_v_20110906.pdf Ammono S. A.]<br/>(3)[http://www.photonic.saint-gobain.com/GaN-Free-Standing.aspx Saint-Gobain Crystals - Photonic Materials] | ||
|- | |- | ||
| N/A(P type)<br /> | | N/A(P type)<br /> | ||
Line 111: | Line 108: | ||
| rowspan="2"|um<br /> | | rowspan="2"|um<br /> | ||
| rowspan="2"|Ellipsometry<br /> | | rowspan="2"|Ellipsometry<br /> | ||
| 200-475(N type)<br /> | | 300-400(N type)[1,4]<br/>475[3]<br/>200-475(N type)<br /> | ||
| <br /> | | <br /> | ||
| rowspan="2"|<br /> | | rowspan="2"|(1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br />(2)[http://ammono.com/files/products/Ammono_GaN_Ultra_High_Resistivity_SI_substrates_v_20110906.pdf Ammono S. A.]<br/>(3)[http://www.luxmaterial.com/en/products-132941-0-item-164128.html?backurl=/en/products-132941-38872.html Lux Material Co., Ltd.]<br/>(4)[http://www.photonic.saint-gobain.com/GaN-Free-Standing.aspx Saint-Gobain Crystals - Photonic Materials] | ||
|- | |- | ||
| 475(Semi insulating)<br /> | | >300[2]<br/>475(Semi insulating)[3]<br /> | ||
| <br /> | | <br /> | ||
|- | |- | ||
| Misorientation<br /> | | Misorientation<br /> | ||
| deg<br /> | | deg<br/> | ||
| SEM and TEM<br /> | | SEM and TEM<br /> | ||
| On demand<br /> | | On demand<br /> | ||
| <br /> | | <br/> | ||
| <br /> | | <br/> | ||
|- | |- | ||
| Macro defect density<br /> | | Macro defect density<br /> | ||
Line 129: | Line 126: | ||
| TEM and XRD<br /> | | TEM and XRD<br /> | ||
| A grade<=2; B grade>2<br /> | | A grade<=2; B grade>2<br /> | ||
| <br /> | | <br/> | ||
| <br /> | | <br/> | ||
|- | |- | ||
| Bow<br /> | | Bow<br /> | ||
| um<br /> | | um<br /> | ||
| SEM or AFM<br /> | | SEM or AFM<br /> | ||
| <5<br /> | | <10[1]<br/><20[2]<br/><5<br /> | ||
| <br /> | | <br/> | ||
| <br /> | | (1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br />(2)[http://www.luxmaterial.com/en/products-132941-0-item-164128.html?backurl=/en/products-132941-38872.html Lux Material Co., Ltd.] | ||
|- | |- | ||
| Total thickness variation (TTV)<br /> | | Total thickness variation (TTV)<br /> | ||
| um<br /> | | um<br /> | ||
| AFM(preferred) and SEM<br /> | | AFM(preferred) and SEM<br /> | ||
| < | | <40[1],~20[2]<br/><15[3]<br /><10<br /> | ||
| <br /> | | <br /> | ||
| (1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br />(2)[http://ammono.com/files/products/Ammono_GaN_High_Transparency_n-type_substrates_v_20110906.pdf Ammono S. A.]<br/>(3)[http://www.luxmaterial.com/en/products-132941-0-item-164128.html?backurl=/en/products-132941-38872.html Lux Material Co., Ltd.] | |||
|- | |- | ||
| Surface roughness<br /> | | Surface roughness<br /> | ||
| nm<br /> | | nm<br /> | ||
| Profilometer and AFM<br /> | | Profilometer and AFM<br /> | ||
| Ra<0.2;RMS<0.5(epi ready) | | Ra<0.2[1];RMS<0.5(epi ready)<br /> | ||
| <br /> | | <br /> | ||
| (1)[http://www.luxmaterial.com/en/products-132941-0-item-164128.html?backurl=/en/products-132941-38872.html Lux Material Co., Ltd.]<br /> | |||
|- | |- | ||
| Thermal expansion coeff(300K)<br /> | | Thermal expansion coeff(300K)<br /> | ||
| /K<br /> | | /K<br /> | ||
| Thermal elastic measurement<br /> | | Thermal elastic measurement<br /> | ||
| along a0:5.59x10<sup>-6</sup>; along c0:7.75x10<sup>-6</sup> | | along a0:5.59x10<sup>-6</sup>; along c0:7.75x10<sup>-6</sup>[1]<br /> | ||
| <br /> | | <br /> | ||
| (1)[http://www.qualitymaterial.net/GaN-substrate.html Kyma Technologies]<br /> | |||
|- | |- | ||
| Dielectric constant(300K)<br /> | | Dielectric constant(300K)<br /> | ||
| <br /> | | <br /> | ||
| Ellipsometry<br /> | | Ellipsometry<br /> | ||
| along a0:10.4; along c0:9.5 | | along a0:10.4; along c0:9.5[1]<br /> | ||
| <br /> | | <br /> | ||
| (1)[http://www.qualitymaterial.net/GaN-substrate.html Kyma Technologies]<br /> | |||
|- | |- | ||
| Refractive index<br /> | | Refractive index<br /> | ||
| <br /> | | <br /> | ||
| Ellipsometry<br /> | | Ellipsometry<br /> | ||
| 2.67 at 3.38eV | | 2.67 at 3.38eV[1]<br /> | ||
| <br /> | | <br /> | ||
| (1)[http://www.qualitymaterial.net/GaN-substrate.html Kyma Technologies]<br /> | |||
|- | |- | ||
| Electron Effective mass<br /> | | Electron Effective mass<br /> | ||
| <br /> | | <br /> | ||
| <br /> | | <br /> | ||
| 0.22<br /> | | 0.22[1]<br /> | ||
| <br /> | | <br /> | ||
| (1)[http://www.qualitymaterial.net/GaN-substrate.html Kyma Technologies]<br /> | |||
|- | |||
| FWHM of X-ray rocking curve,epi-ready surface at 100 µm x 100 µm slit)<br /> | |||
| arcsec<br /> | |||
| X-ray diffraction<br /> | |||
| ~20[1]<br /> | |||
| <br /> | | <br /> | ||
| (1)[http://ammono.com/files/products/Ammono_GaN_High-carrier-concentration_n-type_substrates_v_20110906.pdf Ammono S. A.]<br /> | |||
|- | |- | ||
| rowspan="32"| GaN template on sapphire | | rowspan="32"| GaN template on sapphire |
Revision as of 01:13, 14 October 2013
Figures of Merit for GaN substrates
Bulk Type | Property | Units | Characterization Method | Industry range | Goal | Reference/hyperlink |
---|---|---|---|---|---|---|
GaN freestanding substrate | Bandgap(300K) |
eV |
PL |
3.44[1,2] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 (2)Xiamen Powerway Advanced Material Co. Ltd. | |
Electron mobility(300K) |
cm2/V s |
Hall effect sensor |
~150[1],~250[2] 1350[4] 150(for n=1019)[3] 240(for n=1018)[3] 500(for n=1017)[3] |
(1)Ammono S. A. (2)Ammono S. A. (3)Kyma Technologies (4)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Hole mobility(300K) |
cm2/V s |
Hall effect sensor |
13[1] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Melting point |
K |
Thermal couple |
2573[1] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Lattice constants |
nm |
X-ray diffraction |
a=0.319;c=0.518[1] a=0.3189;c=0.5185[2] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 (2)Kyma Technologies | ||
Thermal conductivity(300K) |
W/cm K |
Time-domain thermoreflectance |
2.0-2.4[1] |
(1)Kyma Technologies | ||
Heat capacity |
J/mol K |
Constant presure heating |
35.3[1] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Elastic modulus |
GPa |
Mechanical measurement |
210[1] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Dislocation density |
/cm2 |
TEM and XRD |
~5x104[1] ≤5 x 106[2] 1x107-4x107[3] |
(1)Ammono S. A. (2)Lux Material Co., Ltd. (3)Saint-Gobain Crystals - Photonic Materials | ||
Sheet carrier density |
/cm2 |
SIMS |
N/A |
|||
Sheet resistance/Resistivity |
ohm-cm |
0.1-1(Undoped)[3] |
(1)Ammono S. A. (2)Ammono S. A. (3)Lux Material Co., Ltd. (4)Saint-Gobain Crystals - Photonic Materials | |||
10-3-10-2(N type)[1] <0.01(N type)[3] <0.03[4] |
||||||
109-1012[2] >106(Semi insulating)[3] |
||||||
Carrier concentration |
/cm3 |
SIMS |
~1019(N type)[1] 3x1017(N type)[2] 1x1018-3x1018(N type)[3] |
(1)Ammono S. A. (2)Ammono S. A. (3)Saint-Gobain Crystals - Photonic Materials | ||
N/A(P type) |
||||||
Thickness |
um |
Ellipsometry |
300-400(N type)[1,4] 475[3] 200-475(N type) |
(1)Ammono S. A. (2)Ammono S. A. (3)Lux Material Co., Ltd. (4)Saint-Gobain Crystals - Photonic Materials | ||
>300[2] 475(Semi insulating)[3] |
||||||
Misorientation |
deg |
SEM and TEM |
On demand |
|||
Macro defect density |
/cm2 |
TEM and XRD |
A grade<=2; B grade>2 |
|||
Bow |
um |
SEM or AFM |
<10[1] <20[2] <5 |
(1)Ammono S. A. (2)Lux Material Co., Ltd. | ||
Total thickness variation (TTV) |
um |
AFM(preferred) and SEM |
<40[1],~20[2] <15[3] <10 |
(1)Ammono S. A. (2)Ammono S. A. (3)Lux Material Co., Ltd. | ||
Surface roughness |
nm |
Profilometer and AFM |
Ra<0.2[1];RMS<0.5(epi ready) |
(1)Lux Material Co., Ltd. | ||
Thermal expansion coeff(300K) |
/K |
Thermal elastic measurement |
along a0:5.59x10-6; along c0:7.75x10-6[1] |
(1)Kyma Technologies | ||
Dielectric constant(300K) |
Ellipsometry |
along a0:10.4; along c0:9.5[1] |
(1)Kyma Technologies | |||
Refractive index |
Ellipsometry |
2.67 at 3.38eV[1] |
(1)Kyma Technologies | |||
Electron Effective mass |
0.22[1] |
(1)Kyma Technologies | ||||
FWHM of X-ray rocking curve,epi-ready surface at 100 µm x 100 µm slit) |
arcsec |
X-ray diffraction |
~20[1] |
(1)Ammono S. A. | ||
GaN template on sapphire | Bandgap(300K) |
eV |
PL |
3.44[1,2] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 (2)Xiamen Powerway Advanced Material Co. Ltd. | |
Electron mobility(300K) |
cm2/V s |
Hall effect sensor |
1350[1] 150(for n=1019)[2] 240(for n=1018)[2] 500(for n=1017)[2] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 (2)Xiamen Powerway Advanced Material Co. Ltd. | ||
Hole mobility(300K) |
cm2/V s |
Hall effect sensor |
13[2],20[1] |
(1)MTI Corp. (2)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Melting point |
K |
Thermal couple |
2573[1] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Lattice constants |
nm |
X-ray diffraction |
a=0.319;c=0.518[1] a=0.3189;c=0.5185[2] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 (2)Xiamen Powerway Advanced Material Co. Ltd. | ||
Thermal conductivity(300K) |
W/cm K |
Time-domain thermoreflectance |
2.3(semi insulating)[1]; 1.7(HVPE material,n=1x1017)[1] |
(1)Xiamen Powerway Advanced Material Co. Ltd. | ||
Heat capacity |
J/mol K |
Constant presure heating |
35.3[1] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Elastic modulus |
GPa |
Mechanical measurement |
210[1] |
(1)http://www.springer.com/materials/book/978-3-642-04828-9 | ||
Dislocation density |
/cm2 |
TEM and XRD |
≤1 x 108[1,2,5,7] 5 x 108-6 x 108(for N type and undoped)[3] 8 x 108(for semi insulating)[3] 8 x 107-9 x 107(for N type and undoped)[4] 5 x 108-3 x 107(for N type,Semi insulating and undoped)[6] |
(1)Xiamen Powerway Advanced Material Co., Ltd. (2)Anhui Haibei Import & Export Co., Ltd. (3)Saint-Gobain Crystals-Photonic Materials (4)Saint-Gobain Crystals-Photonic Materials (5)Precision Micro-Optics LLC (6)RF-Lambda USA LLC (7)Atecom Technology Co., Ltd. | ||
Sheet carrier density |
/cm2 |
SIMS |
N/A |
|||
Sheet resistance/Resistivity |
ohm-cm |
<0.05(Undoped)[1,7,11] |
(1)Xiamen Powerway Advanced Material Co., Ltd. (2)Anhui Haibei Import & Export Co., Ltd. (3)Precision Micro-Optics LLC (4)MTI Corp. (5)MTI Corp. (6)MTI Corp. (7)RF-Lambda USA LLC (8)RF-Lambda USA LLC (9)RF-Lambda USA LLC (10)Atecom Technology Co., Ltd. (11)Kyma Technologies | |||
<0.05(N type)[1,2,3,5,10],.001-.01[8] |
||||||
<1(P type)[1] 3-5(P type)[4] |
||||||
>106(Semi insulating)[1,2,3,6,10],109-1012(Semi insulating)[9] |
||||||
Carrier concentration |
/cm3 |
SIMS |
~1019(N type)[4] 1x1018-3x1018(N type)[2] ~1018(N type)[6] 1018(N type)[7] |
(1)Xiamen Powerway Advanced Material Co., Ltd. (2)Saint-Gobain Crystals-Photonic Materials (3)MTI Corp. (4)MTI Corp. (5)RF-Lambda USA LLC (6)RF-Lambda USA LLC (7)Kyma Technologies | ||
~1017(P type)[1] 1017-3x1018(P type)[3] 5x1017(P type)[7] |
||||||
3x1017(undoped)[2] <2x1017(undoped)[5] 1016(undoped)[7] |
||||||
Thickness(epilayer) |
um |
Ellipsometry |
3-100(N type,undoped)[1,2,3,4,5,6] |
(1)Xiamen Powerway Advanced Material Co., Ltd. (2)Anhui Haibei Import & Export Co., Ltd. (3)Saint-Gobain Crystals-Photonic Materials (4)Precision Micro-Optics LLC (5)RF-Lambda USA LLC (6)Atecom Technology Co., Ltd. | ||
5-100(P type)[1] |
||||||
20-90(Semi insulating)[1,2,3,6] |
||||||
Buffer layer(sapphire) thickness |
um |
Ellipsometry |
430[1,3],330[2] |
(1)Xiamen Powerway Advanced Material Co., Ltd. (2)Saint-Gobain Crystals-Photonic Materials (3)MTI Corp. | ||
Misorientation |
deg |
SEM and TEM |
On demand |
|||
Macro defect density |
/cm2 |
TEM and XRD |
<5[1,3], <10[2] |
(1)MTI Corp. (2)RF-Lambda USA LLC (3)Kyma Technologies | ||
Bow |
um |
SEM or AFM |
10-500[1] |
(1)RF-Lambda USA LLC | ||
Total thickness variation (TTV) |
um |
AFM(prefered)and SEM |
<10 |
|||
Surface roughness |
nm |
Profilometer and AFM |
RMS~10[1],Ra<0.2;RMS<0.5(epi ready) |
(1)MTI Corp. | ||
Thermal expansion coeff(300K) |
/K |
Thermal elaastic measurement |
along a0:5.59x10-6[1]; along c0:7.75x10-6[1] |
(1)Xiamen Powerway Advanced Material Co. Ltd. | ||
Dielectric constant(300K) |
Ellipsometry |
along a0:10.4[1]; along c0:9.5[1] |
(1)Xiamen Powerway Advanced Material Co. Ltd. | |||
Refractive index |
Ellipsometry |
2.67 at 3.38eV[1] |
(1)Xiamen Powerway Advanced Material Co. Ltd. | |||
Electron Effective mass |
0.22[1] |
(1)Xiamen Powerway Advanced Material Co. Ltd. | ||||
FWHM of(102)XRD arcsec |
X-ray diffraction |
<250[1],~350[2],<300[3] |
(1)Xiamen Powerway Advanced Material Co., Ltd. (2)MTI Corp. (3)RF-Lambda USA LLC | |||
FWHM of(002)XRD arcsec |
X-ray diffraction |
<150[1],~250[2] |
(1)Xiamen Powerway Advanced Material Co., Ltd. (2)MTI Corp. |