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* Insert silicon calibration wafer (apply directly from spider case)
* Insert silicon calibration wafer (apply directly from spider case)
* Click on Align Sample – Calibrate System (default settings are OK)
* Click on Align Sample – Calibrate System (default settings are OK)
* Calibration completed once calibration data window closes
* Calibration completed once "acquiring calibration data" progress reaches 100%
* Click on File – View Log to compare Ps, As values to previous calibrations
* Click on File – View Log to compare Ps, As values to previous calibrations


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:* Track Polarizer
:* Track Polarizer
:* Auto Retarder if delta is expected to go above 180°
:* Auto Retarder if delta is expected to go above 180°


= Data Analysis =
= Data Analysis =

Revision as of 18:14, 27 January 2010

Introduction

To be updated

Equipment Information

To be updated

Protocol

Turning On (after turning on, wait at least 10 min before use to allow for warming up)

  • Turn on control box first – In Hardware window, click Initialize to sync the computer to the ellipsometer (key must be in computer to run WVase32 program)
  • Press Light button on monochromator followed by Ignite to turn the light on
  • Check to make sure appropriate fibre optic cable is attached – depends on light range/size of beam
  • UV: 200nm - 2100nm (dead range from 1350nm – 1450nm due to water absorption)
  • IR: 270nm – 2300nm


Turning Off (suggested to keep electronics warm by leaving on if using the ellipsometer frequently)

  • Press Light button on monochromator to turn off light, press Light again but not Ignite to leave it off but powered


Applying Sample

  • Ensure vacuum box is switched on
  • Switch to appropriate vacuum port as labelled on the back. Slits and holes are used for large and small samples respectively
  • Flip switch on ellipsometer from ‘vent’ to ‘vacuum’
  • Use tweezers (pinch tight) through the sample stage groove to apply sample over the vacuum openings


Calibration (to make sure zero is known for the polarizer and analyzer - should be performed at start of every new testing session)

  • Insert silicon calibration wafer (apply directly from spider case)
  • Click on Align Sample – Calibrate System (default settings are OK)
  • Calibration completed once "acquiring calibration data" progress reaches 100%
  • Click on File – View Log to compare Ps, As values to previous calibrations


Aligning Sample (performed for every newly placed sample)

  • In Hardware window, click Acquire Data – Alignment
  • Carefully insert alignment detector
  • Align red cross in centre of the four grey boxes on screen by adjusting alignment knobs (two black knobs) – cross will move around naturally but want it to be close to centre (X and Y values <1 ideally) – press Esc to exit once completed
  • If alignment detector is way off (no or very small grey boxes) one must find the beam manually to get rough sample alignment first
  • Remove alignment detector
  • Align z-axis by adjusting silver knob to maximize the height of the red line on screen (it may gradually rise if the light is recently turned on) – press Esc to exit once completed


Acquiring Data (once sample is aligned)

  • In Hardware window, click Acquire Data – Spectroscopic Scan
  • Recommended options:
  • 50 – 100nm intervals in wavelength
  • 20 Revs/meas. – greater if noisy
  • 3 angles: one below, equal to and above Brewster angle for substrate (73°, 76°, 79° for samples on a glass substrate)
  • Dynamic Averaging (100 max)
  • Save File every 15 min (forces to name file and comment initially)
  • More Settings:
  • Track Polarizer
  • Auto Retarder if delta is expected to go above 180°

Data Analysis

To be updated

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