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M. Datta and D. Landolt, “Fundamental aspects and applications of electrochemical microfabrication,” Electrochimica Acta, vol. 45, no. 15–16, pp. 2535–2558, 2000.
Two mass transport mechanisms, dissolution limited & acceptor limited
Limiting-current density
D. Landolt, P. F. Chauvy, and O. Zinger, “Electrochemical micromachining, polishing and surface structuring of metals: Fundamental aspects and new developments,” Electrochim. Acta, vol. 48, no. 20–22, pp. 3185–3201, 2003.
Pitting vs brightening
Oxide layer -> unstable -> polishing (high voltage usually) (contradiction to later?)
Initial phase charge small vs total charge -> good polish (high voltage...)
J. B. Mathieu, “Electropolishing of Titanium in Perchloric Acid-Acetic Acid Solution,” J. Electrochem. Soc., vol. 125, no. 7, p. 1044, 1978.
Anode potential vs oxide layer thickness
Breakdown -> polishing (contradiction to later?)
R. Vidal and a C. West, “Copper Electropolishing in Concentrated Phosphoric-Acid .1. Experimental Findings,” J. Electrochem. Soc., vol. 142, no. 8, pp. 2682–2689, 1995.
Good quick history
Rotating electrode -> larger limiting current -> theory (Tribollet & Newman)
R. Vidal and a C. West, “Copper Electropolishing in Concentrated Phosphoric-Acid .1. Experimental Findings,” J. Electrochem. Soc., vol. 142, no. 8, pp. 2682–2689, 1995.
Current limiting region
Potential surge after a while -> bad
Too low current density -> no boundary layer
Good schematic...
D. Landolt, P. F. Chauvy, and O. Zinger, “Electrochemical micromachining, polishing and surface structuring of metals: Fundamental aspects and new developments,” Electrochim. Acta, vol. 48, no. 20–22, pp. 3185–3201, 2003.
