mNo edit summary
Line 27: Line 27:
Fumitoshi Sugimoto and Sigeru Okamura, “[http://jes.ecsdl.org/content/146/7/2725.short Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface]” ''Journal of The Electrochemical Society'', '''146'''(7), 2725-2729, 1999.
Fumitoshi Sugimoto and Sigeru Okamura, “[http://jes.ecsdl.org/content/146/7/2725.short Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface]” ''Journal of The Electrochemical Society'', '''146'''(7), 2725-2729, 1999.
*
*
K. J. Budde, W. J. Holzapfel, and M. M. Beyer , “[http://jes.ecsdl.org/content/142/3/888.short Application of Ion Mobility Spectrometry to Semiconductor Technology: Outgassings of Advanced Polymers under Thermal Stress]” ''Journal of The Electrochemical Society'', '''142'''(3), 888-897, 1995.
* Outgassing characteristics of PP, PC, PFA, PVDF, ABS and PTFE

Revision as of 08:30, 7 November 2017

Search Terms

  • "storage box" AND particles AND cleanroom

Organic airborne contamination on Si wafers

Walter Dena, Hsunling Bai, and Yuhao Kang, “[http://jes.ecsdl.org/content/153/2/G149.full Organic Airborne Molecular Contamination in Semiconductor Fabrication Clean Rooms A Review]” Journal of The Electrochemical Society, 153(2), G149-G159, 2006.

Yong-Jun Liu and Hua-Zhong Yu, “Effect of Organic Contamination on the Electrical Degradation of Hydrogen-Terminated Silicon upon Exposure to Air under Ambient ConditionsJournal of The Electrochemical Society, 150(12), G861-G865, 2003.

Hitoshi Habuka, Syuichi Ishiwari, Haruo Kato, Manabu Shimada, and Kikuo Okuyamad, “Airborne Organic Contamination Behavior on Silicon Wafer SurfaceJournal of The Electrochemical Society, 150(2), G148-G154, 2003.

Syuichi Ishiwari, Haruo Kato, and Hitoshi Habuka, “Development of Evaluation Method for Organic Contamination on Silicon Wafer SurfacesJournal of The Electrochemical Society, 148(11), G644-G648, 2001.

Hitoshi Habuka, Manabu Shimada and Kikuo Okuyama, “Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer SurfaceJournal of The Electrochemical Society, 148(7), G365-G369, 2001.

Fumitoshi Sugimoto and Sigeru Okamura, “Adsorption Behavior of Organic Contaminants on a Silicon Wafer SurfaceJournal of The Electrochemical Society, 146(7), 2725-2729, 1999.


K. J. Budde, W. J. Holzapfel, and M. M. Beyer , “Application of Ion Mobility Spectrometry to Semiconductor Technology: Outgassings of Advanced Polymers under Thermal StressJournal of The Electrochemical Society, 142(3), 888-897, 1995.

  • Outgassing characteristics of PP, PC, PFA, PVDF, ABS and PTFE
Cookies help us deliver our services. By using our services, you agree to our use of cookies.