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== | ==Organic airborne contamination on Si wafers== | ||
Walter Dena, Hsunling Bai, and Yuhao Kang, “[http://jes.ecsdl.org/content/153/2/G149.full Organic Airborne Molecular Contamination in Semiconductor Fabrication Clean Rooms | Walter Dena, Hsunling Bai, and Yuhao Kang, “[http://jes.ecsdl.org/content/153/2/G149.full Organic Airborne Molecular Contamination in Semiconductor Fabrication Clean Rooms | ||
Revision as of 08:00, 7 November 2017
Search Terms
- "storage box" AND particles AND cleanroom
Organic airborne contamination on Si wafers
Walter Dena, Hsunling Bai, and Yuhao Kang, “[http://jes.ecsdl.org/content/153/2/G149.full Organic Airborne Molecular Contamination in Semiconductor Fabrication Clean Rooms A Review]” Journal of The Electrochemical Society, 153(2), G149-G159, 2006.
Yong-Jun Liu and Hua-Zhong Yu, “Effect of Organic Contamination on the Electrical Degradation of Hydrogen-Terminated Silicon upon Exposure to Air under Ambient Conditions” Journal of The Electrochemical Society, 150(12), G861-G865, 2003.
Hitoshi Habuka, Syuichi Ishiwari, Haruo Kato, Manabu Shimada, and Kikuo Okuyamad, “Airborne Organic Contamination Behavior on Silicon Wafer Surface” Journal of The Electrochemical Society, 150(2), G148-G154, 2003.
Syuichi Ishiwari, Haruo Kato, and Hitoshi Habuka, “Development of Evaluation Method for Organic Contamination on Silicon Wafer Surfaces” Journal of The Electrochemical Society, 148(11), G644-G648, 2001.
Hitoshi Habuka, Manabu Shimada and Kikuo Okuyama, “Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface” Journal of The Electrochemical Society, 148(7), G365-G369, 2001.
Fumitoshi Sugimoto and Sigeru Okamura, “Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface” Journal of The Electrochemical Society, 146(7), 2725-2729, 1999.