3D-printed devices with cleanroom air compatibility -- Lit. review: Difference between revisions

Revision as of 07:52, 7 November 2017

Hitoshi Habuka, Syuichi Ishiwari, Haruo Kato, Manabu Shimada, and Kikuo Okuyamad, “Airborne Organic Contamination Behavior on Silicon Wafer Surface” Journal of The Electrochemical Society, 150(2), G148-G154, 2003.

Syuichi Ishiwari, Haruo Kato, and Hitoshi Habuka, “Development of Evaluation Method for Organic Contamination on Silicon Wafer Surfaces” Journal of The Electrochemical Society, 148(11), G644-G648, 2001.

Fumitoshi Sugimoto and Sigeru Okamura, “Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface” Journal of The Electrochemical Society, 146(7), 2725-2729, 1999.

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 ==Characterization of particles==
-Fumitoshi Sugimoto and Sigeru Okamura, “[http://jes.ecsdl.org/content/146/7/2725.short Getting It Done: Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface]” ''Journal of The Electrochemical Society'', '''146'''(7), 2725-2729, 1999.
+Hitoshi Habuka, Syuichi Ishiwari, Haruo Kato, Manabu Shimada, and Kikuo Okuyamad, “[http://jes.ecsdl.org/content/150/2/G148.full Airborne Organic Contamination Behavior on Silicon Wafer Surface]” ''Journal of The Electrochemical Society'', '''150'''(2), G148-G154, 2003.
+*
+Syuichi Ishiwari, Haruo Kato, and Hitoshi Habuka, “[http://jes.ecsdl.org/content/148/11/G644.full Development of Evaluation Method for Organic Contamination on Silicon Wafer Surfaces]” ''Journal of The Electrochemical Society'', '''148'''(11), G644-G648, 2001.
 *
-<ol>
+Fumitoshi Sugimoto and Sigeru Okamura, “[http://jes.ecsdl.org/content/146/7/2725.short Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface]” ''Journal of The Electrochemical Society'', '''146'''(7), 2725-2729, 1999.
-<li>{{Cite journal
+*
-| volume = 9
-| issue = 2
-| pages = 81-86
-| last = Stephenson
-| first = D.G.
-| title = Equations for solar heat gain through windows
-| journal = Solar Energy
-| accessdate = 2012-02-10
-| date = 1964
-| url = http://services.lib.mtu.edu:2116/science/article/pii/0038092X65902070
-}}
-<br>