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=Optimised antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxide
*All three requirements fulfilled by using N2/SiH4 and NH3/SiH4
===Optimised antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxide===
[http://onlinelibrary.wiley.com/doi/10.1002/%28SICI%291099-159X%28199907/08%297:4%3C245::AID-PIP255%3E3.0.CO;2-3/full?2-3/full#references Nagel, H., Aberle, A.G. and Hezel, R., 1999. Optimised antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxide. Progress in Photovoltaics: Research and Applications, 7(4), pp.245-260.]
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