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{{MOST}} | |||
[[category:MOST methods]] | |||
==Hardware:== | ==Hardware:== | ||
Revision as of 16:18, 23 May 2017
Hardware:
Precursor vaporizer
- Crucible : This holds a pre measured quantity of precursor
- Crucible lid: This screws onto the crucible and ends in a barb fitting, connecting the crucible to the tubing that carries PC gas to the mixing chamber
- Hot plate: The crucible is placed on the hot plate to heat it to specified temperature
- Nitrogen bottle with regulator: Purge gas
Tubing, fittings and valves
- Tubing: Chemically inert polypropylene tubing is used
- Ball valve: Used as a shutoff valve to start and stop flow of gas
- Needle valve: Used to regulate flow of gas