This is a page on ALD on polymers...

Atomic Layer Deposition (ALD)

Principles of ALD

  • Franssila, S. Introduction to Microfabrication. 2nd ed. John Wiley & Sons. Ltd., 2010. ISBN 978-0-470-74983-8.
  • Leskelä, M. & Ritala, M. Atomic layer deposition chemistry: recent developments and future challenges. Angewandte Chemie. Volume 42, 2003, iss. 45, pp. 5548.
  • Kääriäinen, T et al. Atomic layer deposition: principles, characteristics and nanotechnology applications. 2nd ed. John Wiley & Sons. Ltd., 2013. ISBN 9781118747384.
  • George, S.M. Atomic layer deposition: an overview. Chemical reviews. Volume 110, 2010, iss. 1, pp. 111.
  • Johnson, R.W., Hultqvist A. & Bent, F.S. A brief review of atomic layer deposition: from fundamentals to applications. Materials today. Volume 17, 2014, iss. 5, pp. 236.
  • Poodt, P et al. Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition. Journal of vacuum science & technology. Volume 30, 2012, iss. 1, pp. 010802.

Thermal ALD

  • George, S.M. Atomic layer deposition: an overview. Chemical reviews. Volume 110, 2010, iss. 1, pp. 111.

Plasma- or radical-enhanced ALD

  • George, S.M. Atomic layer deposition: an overview. Chemical reviews. Volume 110, 2010, iss. 1, pp. 111.
  • Profijt, H.B et al. Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges. Journal of Vacuum Science & Technology. Volume 29, 2011, iss. 5, pp. 050801.

Spatial ALD

  • Poodt, P et al. Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition. Journal of vacuum science & technology. Volume 30, 2012, iss. 1, pp. 010802.
  • Poodt, P et al. High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide layers for Solar Cell Passivation. Volume 22, 2010, iss. 32, pp. 3564.

ALD of AL2O3

  • George, S.M. Atomic layer deposition: an overview. Chemical reviews. Volume 110, 2010, iss. 1, pp. 111.
  • Puurunen, R.L. Surface chemistry of atomic layer deposition: A case study fot the trimethylaluminun/water process. Journal of Applied Physics. Volume 97, 2005, iss. 12, pp. 9.
  • Poodt, P et al. High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide layers for Solar Cell Passivation. Volume 22, 2010, iss. 32, pp. 3564.
  • Groner, M. Low-Temperature Al2O3 Atomic Layer Deposition. Low-temperature Al2O3 atomic layer deposition. Chemistry of materials. Volume 16, 2004, iss. 4, pp. 639.
  • Dhakal, D. Atomic Layer Deposition: Self-terminating and Saturating gas-solid Chemical Reaction on the Substrate. Available online: http://www.dileepnanotech.com/ALD_Saturating__Chemical_Reaction.htm. Cited 2.11.2017.

ALD equipment

  • George, S.M. Atomic layer deposition: an overview. Chemical reviews. Volume 110, 2010, iss. 1, pp. 111.
  • Ritala, M. & Leskelä, M. Atomic layer deposition. Handbook of Thin Film Materials. Volume 1, 2002, iss. 1, pp. 138.
  • Edy, R et al. Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition. Nanoscale Research Letters. Volume 8, 2013, iss. 1, pp. 79.

3D printable polymers

Additive manufacturing (AM)

Stereolithography (SLA)

Selective laser sintering (SLS)

Fused filament fabrication (FFF)

  • Dudek, P. FDM 3D Printing Technology in Manufacturing Composite Elements. Volume 58, 2013, iss. 4, pp. 1415.
  • 3D Printing from scratch. 3D Printing Materials. Available online: http://3dprintingfromscratch.com/common/3d-printing-materials/. Cited 7.12.2017.
  • Bogue, R. 3D printing: the dawn of a new era in manufacturing? Assembly Automation. Volume 33, 2013, iss. 4, pp. 307.

Polymers in ALD

  • Guo, H.C et al. Recent progress of atomic layer deposition on polymeric materials. Materials Science and Engineering C. Volume 70, 2017, iss. 2, pp. 1182.

Principles of ALD on polymers

  • Guo, H.C et al. Recent progress of atomic layer deposition on polymeric materials. Materials Science and Engineering C. Volume 70, 2017, iss. 2, pp. 1182.
  • Wilson, C. A et al. Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers. Chemistry of Materials. Volume 17, 2005, iss. 23, pp. 5625.

Applications of ALD-coated polymers

  • Guo, H.C et al. Recent progress of atomic layer deposition on polymeric materials. Materials Science and Engineering C. Volume 70, 2017, iss. 2, pp. 1182.
  • Xiao, X et al. Durable superhydrophobic wool fabrics coating with nanoscale Al2O3 layer by atomic layer deposition. Volume 349, 2015, pp. 876-879.
  • Park, S.H.K et al. Ultrathin film encapsulation of an OLED by ALD. Electrochemical and solid-state letters. Volume 8, 2005, iss. 2, pp. 21.
  • Clark, M.D et al. Ultra-thin alumina layer encapsulation of bulk heterojunction organic photovoltaics for enhanced device lifetime. Organic electronics. Volume 15, 2014, iss. 1, pp. 1.
  • Ahmad, J. Materials and methods for encapsulation of OPV: A review. Renewable and Sustainable Energy Reviews. Volume 27, 2013, pp. 104-117.
  • Seo, S.W et al. Optimization Al2O3/ZrO2 nanolaminate structure for thin-film encapsulation of OLEDs. Organic electronics. Volume 13, 2012, iss. 11 pp. 2435.
  • Yang, Y.Q et al. Realization of thin film encapsulation by atomic layer deposition of Al2O3 at low temperature. The journal of physical chemistry. Volume 117, 2013, iss. 39, pp. 20308.
  • Kestilä, A. et al. Towards space-grade 3D-printed, ALD –coated small satellite propulsion components for fluidics. Additive Manufacturing. 2016.

Challenges

  • Kestilä, A. et al. Towards space-grade 3D-printed, ALD –coated small satellite propulsion components for fluidics. Additive Manufacturing. 2016.

Future applications

Spatial ALD for flexible electronics

  • Poodt, P et al. Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition. Journal of vacuum science & technology. Volume 30, 2012, iss. 1, pp. 010802.
  • Cros, S et al. Definition of encapsulation barrier requirements: A method applied to organic solar cells. Solar energy materials and solar cells. Volume 95, 2011, pp. 65.
  • Beneq Oy. Beneq delivers world’s first scaled-up roll-to-roll ALD system to ASTRal. Available online: https://beneq.com/en/thin-films/news/beneq-delivers-world%E2%80%99s-first-scaled-roll-roll-ald-system-astral. Cited 15.2.2018.
  • Park, J.S et al. Thin film encapsulation for flexible AM-OLED: a review. Semiconductor Science and Technology. Volume 26, 2011, iss. 3, pp. 034001.

Functionalization of polymers with ALD

  • Zuzuarregui, A et al. Highly reflective polymeric substrates functionalized utilizing atomic layer deposition. Volume 107. 2015, iss. 6, pp. 061602.
  • Wilson, C. A et al. Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers. Chemistry of Materials. Volume 17, 2005, iss. 23, pp. 5625.
  • George, S.M. Atomic layer deposition: an overview. Chemical reviews. Volume 110, 2010, iss. 1, pp. 111.

3D printed reactor for ALD

  • Lubitz, M et al. Cost-Effective Systems for Atomic Layer Deposition. Journal of Chemical Education. Volume 91, 2014, iss. 7, pp. 1022.
  • Pearce, J.M. Building Research Equipment with Free, Open-Source Hardware. Science. Volume 337, 2012, iss. 6100, pp. 1303-1304.
  • Pearce, J.M. Return on Investment for Open Source Hardware Development. Science and Puplic Policy. Volume 43, 2016, pp. 195-195.
  • Pearce, J.M. Impacts of Open Source Hardware in Science and Engineering. The Bridge. Volume 47, 2017, pp. 24.
  • Chaneliere, T. Vacuum compatibility of ABS plastics 3D-printed object. Available online: https://hal.archives-ouvertes.fr/hal-01599113/document. Cited 17.2.2018.
  • Plastic2Print. 1.75mm FEP Natural filament 0.75kg. Available online: https://www.plastic2print.com/175mm-fep-filament-0-75kg.html. Cited 3.3.2018.

References

  1. Franssila, S. Introduction to Microfabrication. 2nd ed. John Wiley & Sons. Ltd., 2010. ISBN 978-0-470-74983-8.
  2. Leskelä, M. & Ritala, M. Atomic layer deposition chemistry: recent developments and future challenges. Angewandte Chemie. Volume 42, 2003, iss. 45, pp. 5548.
  3. Kääriäinen, T et al. Atomic layer deposition: principles, characteristics and nanotechnology applications. 2nd ed. John Wiley & Sons. Ltd., 2013. ISBN 9781118747384.
  4. George, S.M. Atomic layer deposition: an overview. Chemical reviews. Volume 110, 2010, iss. 1, pp. 111.
  5. Suntola, T. & S. Antson, J. U.S. Patent No. 4,058,430, 15.11.1977
  6. Puurunen. R.L. A Short History of Atomic Layer Deposition: Tuomo Suntola’s Atomic Layer Epitaxy. Chemical vapor deposition. Volume 20, 2014, iss. 10-11-12, pp. 332.
  7. Hull, C.W. U.S. Patent No. 4,575,330, 11.03.1986
  8. Deckard, C.R. U.S. Patent No. 5,597,589, 23.01.1997
  9. Crump, S.S. U.S: Patent No. 5,121,329, 30.10.1994
  10. Bensoussan, H. The History of 3D Printing:3D Printing Technologies from the 80s to Today. Available online:https://www.sculpteo.com/blog/2016/12/14/the-history-of-3d-printing-3d-printing-technologies-from-the 80s-to-today/ (14.12.2016). Cited 1.3.2018.
  11. Marlin Steel Wire Products LLC. 3D Printing Vs Traditional Manufacturing. Available online: https://www.marlinwire.com/blog/3d-printing-vs-traditional-manufacturing. Cited 17.3.2018.
  12. Johnson, R.W., Hultqvist A. & Bent, F.S. A brief review of atomic layer deposition: from fundamentals to applications. Materials today. Volume 17, 2014, iss. 5, pp. 236.
  13. Poodt, P et al. Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition. Journal of vacuum science & technology. Volume 30, 2012, iss. 1, pp. 010802.
  14. Profijt, H.B et al. Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges. Journal of Vacuum Science & Technology. Volume 29, 2011, iss. 5, pp. 050801.
  15. Poodt, P et al. High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide layers for Solar Cell Passivation. Volume 22, 2010, iss. 32, pp. 3564.
  16. Puurunen, R.L. Surface chemistry of atomic layer deposition: A case study fot the trimethylaluminun/water process. Journal of Applied Physics. Volume 97, 2005, iss. 12, pp. 9.
  17. Groner, M. Low-Temperature Al2O3 Atomic Layer Deposition. Low-temperature Al2O3 atomic layer deposition. Chemistry of materials. Volume 16, 2004, iss. 4, pp. 639.
  18. Dhakal, D. Atomic Layer Deposition: Self-terminating and Saturating gas-solid Chemical Reaction on the Substrate. Available online: http://www.dileepnanotech.com/ALD_Saturating__Chemical_Reaction.htm. Cited 2.11.2017.
  19. Ritala, M. & Leskelä, M. Atomic layer deposition. Handbook of Thin Film Materials. Volume 1, 2002, iss. 1, pp. 138.
  20. Edy, R et al. Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition. Nanoscale Research Letters. Volume 8, 2013, iss. 1, pp. 79.
  21. AMazing. What is Additive Manufacturing? Available online: http://additivemanufacturing.com/basics/. Cited 8.1.2018.
  22. Stansbury, J.W. 3D printing with polymers: Challenges among expanding options and opportunities. Dental materials. Volume 32, 2016, iss. 1, pp. 54.
  23. Gibson I, Rosen, D.W. & Stucker Brent. Additive manufacturing technologies: rapid prototyping to direct digital manufacturing. Springer 2010. Electronic book.
  24. Lifewire. STL Files: What They Are and How to Use Them. Available online: https://www.lifewire.com/stl-files-2255. Cited 11.1.2018.
  25. Ligon, S.C et al. Polymers for 3D printing and customized additive manufacturing. Chemical reviews. 2017, iss. 117, pp. 10212-10290.
  26. 3D Printing from scratch. Types of 3D printer or 3D printing technologies overview. Available online: http://3dprintingfromscratch.com/common/types-of-3d-printers-or-3d-printing-technologies-overview/. Cited 7.12.2017.
  27. Bogue, R. 3D printing: the dawn of a new era in manufacturing? Assembly Automation. Volume 33, 2013, iss. 4, pp. 307.
  28. 3D Printing from scratch. 3D Printing Materials. Available online: http://3dprintingfromscratch.com/common/3d-printing-materials/. Cited 7.12.2017.
  29. MKS Technologies Pvt Ltd. Stereolithography (SLA). Available online: http://www.mkstechgroup.com/stereolithography-sla/ (8.3.2017). Cited 7.12.2017.
  30. 3D-Print Today. SLS, The Method Behind the Printer. Available online: http://www.3d-print.today/SLS_The_Method_Behind_the_Printer. Cited 8.1.2018.
  31. Dudek, P. FDM 3D Printing Technology in Manufacturing Composite Elements. Volume 58, 2013, iss. 4, pp. 1415.
  32. Guo, H.C et al. Recent progress of atomic layer deposition on polymeric materials. Materials Science and Engineering C. Volume 70, 2017, iss. 2, pp. 1182.
  33. Wilson, C. A et al. Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers. Chemistry of Materials. Volume 17, 2005, iss. 23, pp. 5625.
  34. Xiao, X et al. Durable superhydrophobic wool fabrics coating with nanoscale Al2O3 layer by atomic layer deposition. Volume 349, 2015, pp. 876-879.
  35. Park, S.H.K et al. Ultrathin film encapsulation of an OLED by ALD. Electrochemical and solid-state letters. Volume 8, 2005, iss. 2, pp. 21.
  36. Clark, M.D et al. Ultra-thin alumina layer encapsulation of bulk heterojunction organic photovoltaics for enhanced device lifetime. Organic electronics. Volume 15, 2014, iss. 1, pp. 1.
  37. Ahmad, J. Materials and methods for encapsulation of OPV: A review. Renewable and Sustainable Energy Reviews. Volume 27, 2013, pp. 104-117.
  38. Seo, S.W et al. Optimization Al2O3/ZrO2 nanolaminate structure for thin-film encapsulation of OLEDs. Organic electronics. Volume 13, 2012, iss. 11 pp. 2435.
  39. Yang, Y.Q et al. Realization of thin film encapsulation by atomic layer deposition of Al2O3 at low temperature. The journal of physical chemistry. Volume 117, 2013, iss. 39, pp. 20308.
  40. Kestilä, A. et al. Towards space-grade 3D-printed, ALD –coated small satellite propulsion components for fluidics. Additive Manufacturing. 2016.
  41. Cros, S et al. Definition of encapsulation barrier requirements: A method applied to organic solar cells. Solar energy materials and solar cells. Volume 95, 2011, pp. 65.
  42. Beneq Oy. Beneq delivers world’s first scaled-up roll-to-roll ALD system to ASTRal. Available online: https://beneq.com/en/thin-films/news/beneq-delivers-world%E2%80%99s-first-scaled-roll-roll-ald-system-astral. Cited 15.2.2018.
  43. Park, J.S et al. Thin film encapsulation for flexible AM-OLED: a review. Semiconductor Science and Technology. Volume 26, 2011, iss. 3, pp. 034001.
  44. Zuzuarregui, A et al. Highly reflective polymeric substrates functionalized utilizing atomic layer deposition. Volume 107. 2015, iss. 6, pp. 061602.
  45. Lubitz, M et al. Cost-Effective Systems for Atomic Layer Deposition. Journal of Chemical Education. Volume 91, 2014, iss. 7, pp. 1022.
  46. Pearce, J.M. Building Research Equipment with Free, Open-Source Hardware. Science. Volume 337, 2012, iss. 6100, pp. 1303-1304.
  47. Pearce, J.M. Return on Investment for Open Source Hardware Development. Science and Puplic Policy. Volume 43, 2016, pp. 195-195.
  48. Pearce, J.M. Impacts of Open Source Hardware in Science and Engineering. The Bridge. Volume 47, 2017, pp. 24.
  49. Chaneliere, T. Vacuum compatibility of ABS plastics 3D-printed object. Available online: https://hal.archives-ouvertes.fr/hal-01599113/document. Cited 17.2.2018.
  50. Plastic2Print. 1.75mm FEP Natural filament 0.75kg. Available online: https://www.plastic2print.com/175mm-fep-filament-0-75kg.html. Cited 3.3.2018.
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